Semiconductors » Deposition Equipment (CVD, PVD)

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Used robot interface

  • Trusted Seller
    2022 Novellus/ LAM Concept Two

    2022 Novellus/ LAM Concept Two Speed NExT CVD 8"

    • used

    • Manufacturer: Lam Research - Novellus

    - Wafer Shape: Notch - SMIF Interface: Yes - Cassette Loader: LPI 2200 - Loadlock Indexer Robot: Indexer II - PEC slot: MPS with one cool station - Main power distributer: PDP - System Main Power: 3￠5Wires ...

    United States
  • Trusted Seller
    Novellus C2 Altus spare parts,

    Novellus C2 Altus spare parts, Sabre spare parts

    • used

    • Manufacturer: Lam Research - Novellus
    • Model: Altus

    Contact us with your parts request NOVELLUS OEM TOOL TYPE # of Units TARA PART # PART NAME Part Number NOVELLUS C2 ALTUS 4 100303 ASSY,VENT PURGE 02-834770-00 NOVELLUS C2 ALTUS 19 100304 IO CONTROLLER 27-1015...

    Trim, Ireland
  • Trusted Seller
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    Novellus Systems Inc VECTOR Express PECVD Chemical Vapor Deposition

    • used

    • Manufacturer: Lam Research - Novellus
    • Model: Vector

    Novellus Systems Inc. VECTOR Express PECVD (Chemical Vapor Deposition) Configuration. Supplier Novellus Model Vector Express Description Vector Express – 1 Chamber AHM Facility & Interface WTS(backbone) Facilitie...

    Bree, Ireland
  • Trusted Seller
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    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2005 • System SW Rev.: 3.7_31 • Factory Interface (FI) o FI Ver.: 5.3 o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru ...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2006 • CE Marked • System SW Rev.: 4.0_23 • Factory Interface (FI) o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru / S...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    PECVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    EQUIPMENT DETAILS: • Currently configured for 300mm (12in) wafer sizes • MFG Date: 2008 • CE Marked • Software Version: 5.93 B32 • Cassette Interface: o 300mm Factory Interface (FI) ? (2) 300mm FOUP Load-Ports ? ...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_26 • Factory Interface (FI) o E-Servers installed o (2) 300mm TDK TAS300 (Type F1) FOUP Load-ports o Enhanced 25-slo...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 4.0_23 • Factory Interface (FI) o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru / S...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_31 • Factory Interface (FI) o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru / S...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    • Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_31 • Factory Interface (FI) o (2) 300mm TDK TAS300 (Type F1) FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slo...

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    HDP CVD Chemical Vapor Deposition

    • used

    • Manufacturer: Unknown

    •300mm •Dual FOUP •MAG 7 robot •2005 vintage •Processes oNanofill USG STI/PMD/ILD oNanofill II USG STI oPSG •Single Speed NExT •Bottom facilities •Remote cables – 75ft •User interface – Right •Remote clean oMKS A...

    Bree, Ireland
  • Trusted Seller
    2011 Applied Materials Centura Radiance

    2011 Applied Materials Centura Radiance RPO

    • used

    • Manufacturer: Amat
    • Model: Centura

    HDD not included Wafer Size 300mm Process Plasma Oxidation Technology: TP Platform Type: CENTURA ACP 2X Application: INTEGRATED GATE Wafer Size: 300MM (12 INCH) Wafer Shape: SNNF Position A: R748 RPO Pos...

    Asia
  • Trusted Seller
    2011 Applied Materials Producer eXT

    2011 Applied Materials Producer eXT

    • used

    • Manufacturer: Amat
    • Model: Producer

    Process: poly etch Wafer size: 300mm Carrier: FOUP (Comply with SEMI E47.1 (25wafers)) Load Port: 3 Loadport Facility Plate: N2 Regulator :CDA regulator 125 PSI onboard SMC pressure switch Anti-corrosion Pac...

    Asia
  • Trusted Seller
    1996 AMAT Centura HDP→5300Omega

    1996 AMAT Centura HDP→5300Omega

    • used

    • Manufacturer: Amat
    • Model: Centura

    As is, where is 2ch:SiO2 D/E CH-A/B Process Contact window dry etching Wafer Size 8” Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO Equipment composition 1.Equipment body 2.Primary ...

    Asia
  • Trusted Seller
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    2008 AMAT CENTURA DPS 11 300mm

    • used

    • Manufacturer: Amat
    • Model: Centura

    Condition: As is Process:metal etcher 12" Main frame type:centura AP Factory interface: Description Qty Conduction Loader 1 Three port loader with Kawasaki ATM Robot Mainframe 1 With VHP Robot Chambe...

    Asia
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Overview

CVD (Chemical Vapor Deposition) and PVD (Physical Vapor Deposition) are advanced coating technologies used to apply thin films or coatings to various substrates. CVD involves chemical reactions at the surface of a heated substrate, while PVD involves physical vaporization of a material which then condenses on the substrate. These processes are widely used in industries such as electronics, aerospace, and automotive for enhancing material properties like hardness, wear resistance, and corrosion protection.

FAQ

What should I consider when buying a CVD/PVD machine?

Consider the machine's capacity, compatibility with desired coating materials, and the specific application requirements. Also, check for the machine's condition, age, and maintenance history.

How do I ensure the CVD/PVD machine is shipped safely to my location?

Utilize a specialized transport service experienced in handling delicate and high-value industrial equipment. Ensure the machine is properly packaged and secured to prevent any damage during transit.

What is the maintenance schedule for a CVD/PVD machine?

Regular maintenance includes cleaning the chamber, checking and replacing filters, inspecting seals, and calibrating the system. Follow the manufacturer’s guidelines for detailed maintenance intervals to ensure optimal performance.