Used variable speed in Tokyo, Japan

2001 Advantest F5112

• Manufacturer: Advantest

E-BEAM Lithography System, Maker Advantest, Model F5112, S/N 710000882, Year 2001; Accelaration voltage: 50 kV Field size: 1600 μm x800 μm Beam current: 3.5 μA Beam size: 4 μm x4 μm variable shaped beam Scanning ...