Used Ebara Supporting Equipment (Semiconductors)

Ebara A30W

• used

• Manufacturer: Ebara
• Model: A30W

Ebara A30W 125cfm Dry Pump- Tested to <1mtorr 25cfm, NW50 inlet, NW40 exhaust, 200-220v tested to <1mtorr exhaust filter

2002 EBARA F-REX300

• used

• Manufacturer: Ebara
• Model: F-REX300

EBARA F-REX300, 300 mm, Cu CMP Polish Tool ID: ED05

2005 Ebara A150W-T

• used

• Manufacturer: Ebara
• Model: A150W-T

Dry Pump 3 available Would all need to be rebuilt

EBARA ET300WS TURBO MOLECULAR PUMP

• used

• Manufacturer: Ebara

EBARA ET300WS TURBO MOLECULAR PUMP, TYPE 1, 104040 Used

Ebara ET300WS TURBO MOLECULAR PUMP

• used

• Manufacturer: Ebara

EBARA ET300WS TURBO MOLECULAR PUMP, TYPE 1, 0050-30757, 0020-33988 Item has scratches and markings along the surface as shown in the pictures due to shipping, handling, and/or use. We are selling as used, untest...

Ebara ET600W Turbo Molecular Pump Controller 600W

• used

• Manufacturer: Ebara

Ebara ET600W Turbo Molecular Pump Controller 600W ETC04 PWM-20M, 423293 Used

Ebara EV-S100N Dry Pump, DKF01023, Vacuum, EMB-EVS2, 10000L/min, 3 Phase, 101263

• used

• Manufacturer: Ebara

Ebara EV-S20N Dry Pump, DKB00455, Vacuum, 1670L/min, 5.0 PA, 3 Phase, 453376

• used

• Manufacturer: Ebara

1999 Ebara EPO-2228

• used

• Manufacturer: Ebara

Tool Status Connected Wafer Size 200 mm Fab Section CMP Asset Description Ebara 222 Oxide CMP Polisher Software Version 3.5.14 CIM SECS/GEM Process ILD/IMD CMP Oxide Handler System Robot 1 & Robot 2 2 Fac...

Ebara 40 X 20

• used

• Manufacturer: Ebara

Type: Dry Pump Package (Dual)

Ebara A10S 42.2cfm Dry Pump

• used

• Manufacturer: Ebara

Ebara A10S 42.2cfm Dry Pump Pumping Speed Nitrogen 42.2 CFM (1,199.6 l/m) Ultimate Pressure 3.00E-2(En) torr (4.00E-2 mbar) Inlet Flange KF 40.0 mm (1.575 in) Exhaust Flange KF 40.0 mm (1.575 in) Duty--Service C...

CMP Polisher

• used

• Manufacturer: Ebara

5. Ebara F rex 300 CMP.

EBARA ESR20N

• used

• Manufacturer: Ebara

EBARA ESR20N

EBARA 50x20UERR6M

• used

• Manufacturer: Ebara

EBARA 50x20UERR6M

Ebara AA70W

• used

• Manufacturer: Ebara

Ebara AA70W