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21

Used Plasma Etching (Dry Etching) in South Korea

Hitachi M-501
- Manufacturer: Hitachi
- Model: M-501
RIE (AL-Si/TiW)
Yongin-si, South Korea
HITACHI M-501A
- Manufacturer: Hitachi
- Model: M-501A
AL Dry Etcher Wafer size: 200mm
Yongin-si, South Korea
HITACHI M-308
- Manufacturer: Hitachi
- Model: M-308
AL Etcher Wafer size: 8"
Yongin-si, South Korea
Hitachi M-308
- Manufacturer: Hitachi
- Model: M-308
Metal Etcher Wafer size: 8"
Yongin-si, South Korea
HITACHI M-308
- Manufacturer: Hitachi
- Model: M-308
AL Etcher
Yongin-si, South Korea
1995 Hitachi DM421P
- Manufacturer: Hitachi
- Model: DM421P
Wafer size: 8
Yongin-si, South Korea
1999 Hitachi M-511A
- Manufacturer: Hitachi
- Model: M-511A
Poly Etcher Wafer size: 200mm
Yongin-si, South Korea
2012 HITACHI M8170 XT
- Manufacturer: Hitachi
- Model: M-8170XT
Wafer size: 12
Yongin-si, South Korea
HITACHI M-602
- Manufacturer: Hitachi
- Model: M-602
AL Etcher Wafer size: 8"
Yongin-si, South Korea
Hitachi M-602A
- Manufacturer: Hitachi
- Model: M-602A
AL Etcher Wafer size: 8"
Yongin-si, South Korea
Hitachi M-602A
- Manufacturer: Hitachi
- Model: M-602A
AL Etcher Wafer size: 8"
Yongin-si, South Korea
1997 Hitachi M-501A
- Manufacturer: Hitachi
- Model: M-501A
Metal, 1CH Wafer size: 150mm
Yongin-si, South Korea
1998 Hitachi M-501A
- Manufacturer: Hitachi
- Model: M-501A
Plasma Etcher Wafer size: 200mm
Yongin-si, South Korea
HITACHI M-308
- Manufacturer: Hitachi
- Model: M-308
AL Etcher Wafer size: 8"
Yongin-si, South Korea
Hitachi M-602A
- Manufacturer: Hitachi
- Model: M-602A
AL Etcher Wafer size: 8"
Yongin-si, South Korea

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