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Used controller

  • Trusted Seller
    TECHNICS PEIIA FOR 300mm WAFER

    TECHNICS PEIIA FOR 300mm WAFER

    • Manufacturer: Technics

    TECHNICS PEIIA FOR 300mm WAFER UPGRADED WITH (NEW TOUCH SCREEN CONTROLS, COVERED BY 1 YEAR WARRANTY) HOLDS 1 WAFER, WITH AE 1000W POWER SUPPLY

    Billerica, MA
  • Trusted Seller
    Branson 3075

    Branson 3075

    • Manufacturer: Branson

    BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)

    Billerica, MA
  • Trusted Seller
    BRANSON 3075

    BRANSON 3075

    • Manufacturer: Branson

    BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)

    Billerica, MA
  • Trusted Seller
    TECHNICS PEIIA UPGRADE

    TECHNICS PEIIA UPGRADE

    • Manufacturer: Technics

    TECHNICS PEIIA UPGRADE ONLY (REPLACE OLD CMOS LOGIC BOARD WITH NEW TOUCH SCREEN CONTROLLER) 1 YEAR WARRANTY ON NEW ELECTRONICS AND NEW VACUUM GAUGE WITH 2 SET POINTS. ANY EXTRA REPAIRS NEEDED ARE NOT INCLUDED AND...

    Billerica, MA
  • Trusted Seller
    Lam Research 490 Polyimide plasma

    Lam Research 490 Polyimide plasma etcher

    • Manufacturer: Lam Research - Novellus

    Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

    United States
  • Trusted Seller
    Hitachi Wafer Transfer Robot Missing

    Hitachi Wafer Transfer Robot Missing Screws M-712E Etcher System Untested Spare

    • Manufacturer: Hitachi
    • Model: M-712E

    “Removed from a Hitachi M-712E 200mm Shallow Trench Etcher System. The unit is missing screws from the sensor cover and is missing the pnumatic adjustment screw (see photos).” Hitachi Wafer Transfer Robot Missing...

    $910 USD
    Albuquerque, NM
  • Trusted Seller
    2015 Ulvac NE 950 EX

    2015 Ulvac NE 950 EX RIE Etch System

    • Manufacturer: Ulvac
    • Model: NE-950EX

    - With process gases BCl₃, Cl₂, SiCl₄, CF₄, SF₆, C₄F₈, O₂, and Ar, this versatile ICP etcher is designed to etch GaN, sapphire, metals, ITO, SiC, AlN, ZnO and others - Patented ICP with magnetic confinement (“ISM...

    United States
  • Trusted Seller
    2000 ULVAC Enviro 1 150mm

    2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

    • Manufacturer: Ulvac
    • Model: Enviro

    - Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

    United States
  • Trusted Seller
    Hitachi 3-849438-90 Earth Shield Domestic

    Hitachi 3-849438-90 Earth Shield Domestic M-712 Etcher Spare Surplus

    • Manufacturer: Hitachi
    • Model: M-712

    Hitachi 3-849438-90 Earth Shield Domestic M-712 Etcher Spare Surplus This Hitachi 3-849438-90 Earth Shield Domestic M712 is used untested surplus and is being sold as-is. The physical condition is fair, but there...

    $1,402 USD
    Albuquerque, NM
  • Trusted Seller
    Lam Research 852-011061-103 Lower Chamber

    Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare

    • Manufacturer: Lam Research - Novellus

    “Removed from a Lam Research 4420 Rainbow Plasma Etcher System” Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare Removed from a Lam Research 4420 Rainbow Plasma Etcher System Untested...

    $503 USD
    Albuquerque, NM
  • Trusted Seller
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    AKRION V2-HL2000 Acid Wet Station

    • Manufacturer: Unknown

    Parts Tool – Semi-Auto Wet Process Station Parts: Tanks, Baths, PLC Controller, Heat Exchanger

    Bree, Ireland
  • Trusted Seller
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    LAM 490 Etcher

    • Manufacturer: Lam Research - Novellus

    Fully Rebuilt by Aspect systems. 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

    Trim, Ireland
  • JCXstone stone impact etching machine

    JCXstone stone impact etching machine granite impact etchers glass marble engraving

    • Manufacturer: JCX-Y

    Carving material black granite black marble other black stone Simple installation after receiving the goods, video guidance. Gift U disk, diamond cutter head and so on. Design and use of new functions color glass...

    $5,600 USD

    Get financing

    Est. $110/mo

    Beijing, China
  • 2012 ICP Etcher ULVAC NE950

    2012 ICP Etcher ULVAC NE950

    • Manufacturer: Ulvac
    • Model: NE-950

    GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...

    Wu Xi Shi, China
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
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Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.