Used Etching Systems

Hitachi DI0-01N Control PCB M-712E Used Working

• Manufacturer: Hitachi
• Model: M-712E

Hitachi DI0-01N Control PCB M-712E Used Working Inventory # K-2788, A-5419, A-5486, A-5546 This Hitachi DI0-01N is used, working surplus. The physical condition is good and clean. It was removed from Hitachi M-71...

Semitool 120C0008-507 Spray Acid Tool Spectrum Door Plug EPD SAT New Surplus

• Manufacturer: Semitool
• Model: Spectrum

Semitool 120C0008-507 Spray Acid Tool Spectrum Door Plug EPD SAT New Surplus This Semitool 120C0008-507 is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated...

Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working

• Manufacturer: Hitachi
• Model: M-712E

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Made in Japan Thi...

SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working

• Manufacturer: SMC

“Removed from a Hitachi M-712E Shallow Trench Etcher System.” SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working Inventory # A-16354 Model No: 22-Port Manifold Removed from a Hitachi M-71...

Hitachi PROCESS1 Controller IOTU-01N IOCN-01A AIO-02N M-712E Etcher Working

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi PROCESS1 Controller IOTU-01N IOCN-01A AIO-02N M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Installed PCB's ...

Hitachi PROCESS2 Controller IOTU-01N IOCN-01A AIO-02N M-712E Etcher Working

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi PROCESS2 Controller IOTU-01N IOCN-01A AIO-02N M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Installed PCB's ...

Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Installed PC...

Hitachi CR-712T-AC Wafer Handling Clean Robot Shunan Works M-712E Etcher As-Is

• Manufacturer: Hitachi

“The arm is included but it is not attached and appears incomplete (see photos).” Hitachi CR-712T-AC Wafer Handling Clean Robot Shunan Works M-712E Etcher As-Is Model No: Clean Robot Sold As-Is for Parts or Repai...

Hitachi Wafer Alignment Unit and Controller M-712E Shallow Trench Etcher Used

• Manufacturer: Hitachi
• Model: M-712E

Hitachi Wafer Alignment Unit and Controller M-712E Shallow Trench Etcher Used Inventory # AA-1398 This Hitachi pre-aligner is used working surplus. It was removed from a working hitachi M-712E. Some notable compo...

2013 Hitachi M-8190XT

• Manufacturer: Hitachi
• Model: M-8190XT

Hitachi, M-8190XT, 300mm, Plasma Etch 3 Chambers In Fab, Warm Idle Software version: 2.0405 CIM: E84, SECS-GEM. GEM300, Interface A Hardware Configuration (fab): Main system: Hitachi HTA M-8190XT (3E) Etch ...

2018 STS / SPTS Versalis fxP Etcher

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

2000 LAM Alliance 6 9400 PTX Etcher

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

Lam Research 490 Polyimide plasma etcher

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

• Manufacturer: Ulvac
• Model: Enviro

- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

2001 LAM Rainbow 4420 Poly Etcher

• Manufacturer: Lam Research - Novellus