Semiconductors » Etching Systems

Search By Manufacturer

Search By Country

Building Filters

7

Used ceramic

  • Trusted Seller
    Hitachi Ceramic End Effectors 1-5

    Hitachi Ceramic End Effectors 1-5 300mm Wafer Set of 5 M-712E Used Working

    • Manufacturer: Hitachi
    • Model: M-712E

    “Set includes end effectors 1 to 5, some have dark smudges (see photos). Removed from a Hitachi M-712E Shallow Trench Etcher System.” Hitachi Ceramic End Effectors 1-5 300mm Wafer Set of 5 M-712E Used Working Inv...

    $603 USD
    Albuquerque, NM
  • Trusted Seller
    Hitachi Ceramic End Effectors 1-5

    Hitachi Ceramic End Effectors 1-5 300mm Wafer Complete Set of 5 M-712E Used

    • Manufacturer: Hitachi
    • Model: M-712E

    “Set includes end effectors 1 to 5 with attachment base, some have dark smudges (see photos). Removed from a Hitachi M-712E Shallow Trench Etcher System.” Hitachi Ceramic End Effectors 1-5 300mm Wafer Complete Se...

    $802 USD
    Albuquerque, NM
  • Trusted Seller
    Hitachi 3-843646-01 Ceramic Insulation Ring

    Hitachi 3-843646-01 Ceramic Insulation Ring Hitachi M-712 Etcher New Surplus

    • Manufacturer: Hitachi

    Hitachi High Tech. 3-843646-01 Ceramic Insulation Ring Hitachi M-712 Etcher new Inventory AA-2488 This Hitachi High Tech. 3-843646-01 ceramic insulation ring is new surplus. The physical condition of the ceramic ...

    $502 USD
    Albuquerque, NM
  • Trusted Seller
    Lam Research 852-011061-103 Lower Chamber

    Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare

    • Manufacturer: Lam Research - Novellus

    “Removed from a Lam Research 4420 Rainbow Plasma Etcher System” Lam Research 852-011061-103 Lower Chamber Assembly 4420 Etcher Untested Spare Removed from a Lam Research 4420 Rainbow Plasma Etcher System Untested...

    $503 USD
    Albuquerque, NM
  • Trusted Seller
    Sez SP203 Etcher

    Sez SP203 Etcher

    • Manufacturer: Sez

    Sez SP203 • Currently configured for 8” wafer size • EQUIPMENT DETAILS: Equipment was last in production Q1 2018 and de-installed from fab May 2018. SEZ 203 Spin Processor to include: – 2x shutter door load ports...

    Bree, Ireland
  • no-image_en.png

    TEL Unity ME 85555SSSS

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers

    Yongin-si, South Korea
  • no-image_en.png

    TEL TELUnityIIe 85 DD

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...

    Yongin-si, South Korea

Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.