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Used ch

  • Trusted Seller
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    LAM E5 Kiyo CX 5 CH

    • Manufacturer: Lam Research - Novellus

    LAM – E5 – Kiyo CX – 5 CH – MOLMetalEtch 300 mm Vintage 2013

    Bree, Ireland
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    AMAT EMAX CT+_3CH

    • Manufacturer: Amat

    Wafer size: 12"

    Yongin-si, South Korea
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    AMAT EMAX CT_2CH

    • Manufacturer: Amat

    Wafer size: 12"

    Yongin-si, South Korea
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    AMAT EMAX CT_3CH

    • Manufacturer: Amat

    Wafer size: 12"

    Yongin-si, South Korea
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    AMAT DPS G3_3CH

    • Manufacturer: Amat

    Wafer size: 12"

    Yongin-si, South Korea
  • Trusted Seller
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    Polysilicone Etch

    • Manufacturer: Unknown

    Tool will be removed to a storage room from clean room on January 6th, 2015. Three chambers (A, B and D) were transferred to another Fab and are not available. Confirmed with Fab 15 there are missing & broken par...

    Bree, Ireland
  • Trusted Seller
    2004 Oxford PlasmaLab System 133+

    2004 Oxford PlasmaLab System 133+ RIE CL Reactive Ion Etcher

    • Manufacturer: Oxford

    Was refurbished with OEM specifications Configuration: Supports wafer sizes up to 300mm (330mm Platen) Mechanical chuck RIE set up for GaN Etch RF Power: 600W, 13.56MHz Water cooled electrode 10C-80C End p...

    Asia
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
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    1998 Shibaura CDE-80HN

    • Manufacturer: Shibaura

    Poly, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    1997 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Metal, 1CH Wafer size: 150mm

    Yongin-si, South Korea
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    2000 TEL TE8401

    • Manufacturer: Tokyo Electron - TEL

    SiN, 1CH Wafer size: 200mm

    Yongin-si, South Korea
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    TEL UNITY IIe655DD

    • Manufacturer: Tokyo Electron - TEL

    Oxide, DRM(2CH) Wafer size: 150mm

    Yongin-si, South Korea
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    TEL UNITY Me SCCM

    • Manufacturer: Tokyo Electron - TEL

    Oxide,SCCM(3CH) Wafer size: 200mm

    Yongin-si, South Korea
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    1995 Shibaura CDE-80BHN

    • Manufacturer: Shibaura

    SiN/SiO, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    1996 TEL UNITY IIe85DP

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH) Wafer size: 200mm

    Yongin-si, South Korea
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Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.