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Used chucks

  • Trusted Seller
    Hitachi Wafer Alignment Unit Vacuum

    Hitachi Wafer Alignment Unit Vacuum Chuck M-712E Shallow Trench Etcher Used

    • Manufacturer: Hitachi
    • Model: M-712E

    “Removed from a Hitachi M-712E Shallow Trench Etcher System.” Hitachi Wafer Alignment Unit Vacuum Chuck M-712E Shallow Trench Etcher Used Inventory # A-8439 This Hitachi Alignment Unit is used working surplus. Th...

    $511 USD
    Albuquerque, NM
  • Trusted Seller
    LAM 9600 Etcher for sale

    LAM 9600 Etcher for sale USA

    • Manufacturer: Lam Research - Novellus
    • Model: 9600

    LAM 9600 Etcher Classic software, clamped chuck The tools are in excellent shape and currently running production in USA. Contact:

    Bree, Ireland
  • Trusted Seller
    Sez SP203 Etcher

    Sez SP203 Etcher

    • Manufacturer: Sez

    Sez SP203 • Currently configured for 8” wafer size • EQUIPMENT DETAILS: Equipment was last in production Q1 2018 and de-installed from fab May 2018. SEZ 203 Spin Processor to include: – 2x shutter door load ports...

    Bree, Ireland
  • Trusted Seller
    1995 Shibaura CDE 80 Etchers

    1995 Shibaura CDE 80 Etchers Ashers

    • Manufacturer: Shibaura

    As Is but it was in working condition before warehoused. Wafer : 8 Inches. Vintage : 1995. It's complete with HDD and Software included. Main body. SMIF Loader Controller CRT Keyboard Through the wall SU...

    Asia
  • Trusted Seller
    2004 Oxford PlasmaLab System 133+

    2004 Oxford PlasmaLab System 133+ RIE CL Reactive Ion Etcher

    • Manufacturer: Oxford

    Was refurbished with OEM specifications Configuration: Supports wafer sizes up to 300mm (330mm Platen) Mechanical chuck RIE set up for GaN Etch RF Power: 600W, 13.56MHz Water cooled electrode 10C-80C End p...

    Asia
  • 2012 ICP Etcher ULVAC NE950

    2012 ICP Etcher ULVAC NE950

    • Manufacturer: Ulvac
    • Model: NE-950

    GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...

    Wu Xi Shi, China
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
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    TEL Unity ME 85555SSSS

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers

    Yongin-si, South Korea
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    TEL TELUnityIIe 85 DD

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...

    Yongin-si, South Korea
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    TEL Unity II 85 TPA

    • Manufacturer: Tokyo Electron - TEL

    Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...

    Yongin-si, South Korea
  • Unaxis VERSALINE ICP(DSE-III)

    Unaxis VERSALINE ICP(DSE-III)

    • Manufacturer: Unaxis

    Plasmatherm Unaxis ICP Etcher 6inch ESC Chuck VERSALINE - Loadlock Chamber & Transfer Chamber 6inch Cassette Type - Process Chamber 6inch ESC Chuck Type - RF Generator Module. - Monitor Rack - Chiller Unit S/N ...

    Gyeonggi-do, South Korea

Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.