Semiconductors » Etching Systems

Search By Manufacturer

Search By Country

Building Filters

76

Used dry

  • Trusted Seller
    Lam Research 490 Polyimide plasma

    Lam Research 490 Polyimide plasma etcher

    • Manufacturer: Lam Research - Novellus

    Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

    United States
  • Trusted Seller
    no-image_en.png

    VG Dry clean Bench

    • Manufacturer: Unknown

    Dry Cleaning Bench

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Shibarua Chemical Drying Etcher

    • Manufacturer: Unknown

    Shibarua Chemical Drying Etcher Chemical Drying Etcher

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Corial 300IL ICP Dry Etcher System

    • Manufacturer: Corial

    Corial 300IL ICP Dry Etcher System Tray size is 14inches N2,H2,O2, Gases

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    Corial 300IL ICP Dry Etcher System used semiconductor equipment

    • Manufacturer: Unknown

    Bree, Ireland
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
  • Trusted Seller
    no-image_en.png

    Hitachi M-308ATW

    • Manufacturer: Hitachi
    • Model: M-308ATW

    Trim, Ireland
  • Trusted Seller
    no-image_en.png

    Hitachi M-318SX

    • Manufacturer: Hitachi
    • Model: M-318SX

    Trim, Ireland
  • Trusted Seller
    Sez SP203 Etcher

    Sez SP203 Etcher

    • Manufacturer: Sez

    Sez SP203 • Currently configured for 8” wafer size • EQUIPMENT DETAILS: Equipment was last in production Q1 2018 and de-installed from fab May 2018. SEZ 203 Spin Processor to include: – 2x shutter door load ports...

    Bree, Ireland
  • no-image_en.png

    AMAT Etch dry chamber

    • Manufacturer: Amat

    AXIOM, DPS Wafer size: 12"

    Yongin-si, South Korea
  • Trusted Seller
    no-image_en.png

    Anelva I-4100 SVII SD

    • Manufacturer: Anelva

    Anelva I-4100 SVII SD Dry Etch/Ox/8in.

    Bree, Ireland
  • Trusted Seller
    no-image_en.png

    LAM 490 Etcher

    • Manufacturer: Lam Research - Novellus

    Fully Rebuilt by Aspect systems. 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

    Trim, Ireland
  • Trusted Seller
    2007 Ulvac NE-5700

    2007 Ulvac NE-5700

    • Manufacturer: Ulvac
    • Model: NE-5700

    2007 Ulvac NE-5700 Dry Etcher Metal Etcher

    Asia
  • Trusted Seller
    2007 Ulvac NE-5700

    2007 Ulvac NE-5700

    • Manufacturer: Ulvac
    • Model: NE-5700

    Wafer Size: 150mm Category: Etch Process: Metal Etcher Equipment: Dry Etcher

    Asia
  • 2011 SPTS/STS MUC-21 ETCHER

    2011 SPTS/STS MUC-21 ETCHER

    • Manufacturer: SPTS

    GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...

    Wu Xi Shi, China
12345

Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.