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Used ebara

  • Trusted Seller
    2005 STS ICP PRO HRM

    2005 STS ICP PRO HRM Etcher

    • Manufacturer: STS

    150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...

    United States
  • 2011 SPTS/STS MUC-21 ETCHER

    2011 SPTS/STS MUC-21 ETCHER

    • Manufacturer: SPTS

    GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...

    Wu Xi Shi, China
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    1999 TEL UNITY IIe84SI

    • Manufacturer: Tokyo Electron - TEL

    Poly, IEM(1CH), Ebara Pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • Manufacturer: Tokyo Electron - TEL

    Poly Etch, 1 IEM CH, Ebara pumps (3) Wafer size: 200mm

    Yongin-si, South Korea

Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.