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Tegal 801 Etchers
used
- Manufacturer: Tegal
Tegal 801 Etchers (801) Tegal 801 Etchers*Inline Plasma Etcher*Fully automatic*Microprocessor-based*Plasma chemistry etcher designed especially for the etching of thin films deposited...
Rocklin, CA GaSonics AE-2000LL Isotropic Etcher
used
- Manufacturer: GaSonics
The GaSonics Aura Loadlock Isotropic Etcher (AE-2000LL) is a microprocessor-controlled down-stream etcher that etches the font, and optionally, the backside of a wafer. The AE-200LL uses a dual-pumping loadlocked...
San Jose, CAGASONICS GASONIC L3510
used
- Manufacturer: GaSonics
GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...
Gyeonggi-do, South Korea