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Used o2

  • Trusted Seller
    2000 ULVAC Enviro 1 150mm

    2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

    • Manufacturer: Ulvac
    • Model: Enviro

    - Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

    United States
  • Trusted Seller
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    TEL TE-8600 Etcher

    • Manufacturer: Tokyo Electron - TEL

    W-Etchback Process, Clamptype, 200MM Gas:SF6 Ar O2 He N2

    Trim, Ireland
  • Trusted Seller
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    Corial 300IL ICP Dry Etcher System

    • Manufacturer: Corial

    Corial 300IL ICP Dry Etcher System Tray size is 14inches N2,H2,O2, Gases

    Bree, Ireland
  • Trusted Seller
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    Polysilicone Etch

    • Manufacturer: Unknown

    Tool will be removed to a storage room from clean room on January 6th, 2015. Three chambers (A, B and D) were transferred to another Fab and are not available. Confirmed with Fab 15 there are missing & broken par...

    Bree, Ireland
  • 2012 ICP Etcher ULVAC NE950

    2012 ICP Etcher ULVAC NE950

    • Manufacturer: Ulvac
    • Model: NE-950

    GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...

    Wu Xi Shi, China
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
  • 2011 SPTS/STS MUC-21 ETCHER

    2011 SPTS/STS MUC-21 ETCHER

    • Manufacturer: SPTS

    GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...

    Wu Xi Shi, China
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    1984 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2 treatment)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2/CF4 treatment)

    Yongin-si, South Korea
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    1983 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2/CF4 treatment)

    Yongin-si, South Korea
  • GASONICS GASONIC L3510

    GASONICS GASONIC L3510

    • Manufacturer: GaSonics

    GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...

    Gyeonggi-do, South Korea

Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.