Semiconductors » Etching Systems

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Used pumps

Trusted Seller
Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working
- Manufacturer: Hitachi
“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Installed PC...
$611 USD
Albuquerque, NM
Trusted Seller
SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working
- Manufacturer: SMC
“Removed from a Hitachi M-712E Shallow Trench Etcher System.” SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working Inventory # A-16354 Model No: 22-Port Manifold Removed from a Hitachi M-71...
$611 USD
Albuquerque, NM
Trusted Seller
Ulvac Enviro Downstream Microwave Asher
- Manufacturer: Ulvac
- Model: Enviro
Ulvac Enviro Downstream Microwave Asher consisting of:- Single Chamber Advanced Strip System - Currently Configured for 6" Wafers - Computer- ENI OEM-6B RF Generator- 5 MFCs- Brooks Robot- Edwards IQ Pump/Blower-...
Decatur, GA
Trusted Seller
PLASMA SCIENCES R.I.E. 200W
- Manufacturer: PLASMA SCIENCES
PLASMA SCIENCES PLASMA SCIENCES R.I.E. 200W TABLE TOP REACTIVE ION ETCHER ONE WAFER UP TO 6″ DIAMETER PER CYCLE TURBO PUMPED MICROPROCESSOR CONTROLLED REBUILT ROUGING PUMP
Billerica, MA
Trusted Seller
PLASMA SCIENCES R.I.E. 200W
- Manufacturer: PLASMA SCIENCES
PLASMA SCIENCES R.I.E. 200W TABLE TOP REACTIVE ION ETCHER ONE WAFER UP TO 6″ DIAMETER PER CYCLE. TURBO PUMPED MICROPROCESSOR, CONTROLLED REBUILT ROUGHING PUMP MFC CONTROLS FOR 3 GASES
Billerica, MA
Trusted Seller
Yes R1 DOWNSTREAM PLASMA CLEANER
- Manufacturer: Yes Yield Engineering Systems
YES R1 DOWNSTREAM PLASMA CLEANER AVAILABLE WITH OPTIONAL REBUILT PFPE VACUUM PUMP OPTIONAL UPGRADE TO NEW TOUCH SCREEN WITH 1 YEAR WARRANTY ON NEW ELECTRONICS
Billerica, MA
Trusted Seller
Branson 4450/2
- Manufacturer: Branson
BRANSON 4450/2 DOWN STREAM PLASMA ETCHER (5) SHELVES, 7X17″DEEP DUAL GAS PM119 RF GENERATOR REBUILT VACUUM PUMPS ALSO IN STOCK (HYDROCARBON OR FOMBLIN/KRYTOX)
Billerica, MA
Trusted Seller
BRANSON 2005 PLASMA ETCHER/ASHER
- Manufacturer: Branson
BRANSON BRANSON 2005 PLASMA ETCHER/ASHER PM 119 RF GENERATOR (500 WATTS) 10″ DIAM X 20″DEEP QUARTZ CHAMBER 3 GAS CAPABLILITY INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL
Billerica, MA
Trusted Seller
Branson 3075
- Manufacturer: Branson
BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)
Billerica, MA
Trusted Seller
BRANSON 3075
- Manufacturer: Branson
BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)
Billerica, MA
Trusted Seller
Lam Research 490 Polyimide plasma etcher
- Manufacturer: Lam Research - Novellus
Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller
United States
Trusted Seller
Ulvac Enviro Downstream Microwave Asher
- Manufacturer: Ulvac
- Model: Enviro
- Single Chamber Advanced Strip System - Computer - ENI OEM-6B RF Generator - 5 MFCs - Brooks Robot - Edwards IQ Pump/Blower - Manuals
United States
Trusted Seller
2000 LAM Alliance 6 9400 PTX Etcher
- Manufacturer: Lam Research - Novellus
- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...
United States
Trusted Seller
2005 STS ICP PRO HRM Etcher
- Manufacturer: STS
150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...
United States
Trusted Seller
LAM 590 Etcher
- Manufacturer: Lam Research - Novellus
Original Equipment Manufacturer : Lam Research Condition : AS IS condition(No chiller, no pump, With ENI OEM 12 RF Generator) Wafer Size: 4,5,6 inch capability. Valid Time : Subject to prior sale Lead Time : Read...
Trim, Ireland

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Overview

Etching systems are industrial machines used to remove material from substrates using chemical, plasma, or wet etch processes for PCBs, semiconductors, metals, and decorative finishes. Equipment ranges from benchtop wet etchers to inline plasma/RIE units with process control, exhaust filtration and automation. Buyers prioritize process compatibility, throughput, waste handling, safety features, and the availability of spare parts and consumables when evaluating used or refurbished units.

FAQ

What should I check when buying a used etching system?

Verify process compatibility (chemical vs. plasma), chamber and fixture condition, integrity of seals and pumps, controller/software status, maintenance logs, exhaust and filtration systems, and availability of spare parts and consumables. Ask about prior processes that may have contaminated the unit.

How do I arrange safe shipping for an etching system?

Decontaminate and neutralize all chemicals, drain fluids, disconnect gas and power, and document hazardous-materials history. Use a transporter experienced with lab/semiconductor equipment, crate and secure components, insure the shipment, and prepare required hazmat paperwork and permits.

What regular maintenance does an etching system need?

Routine tasks include chamber cleaning, filter and pump replacement, vacuum seal inspection, gas-line leak tests, controller calibration, and proper waste neutralization/disposal. Keep logs, follow manufacturer service intervals, and replace consumables proactively to maintain process consistency.