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United States - Trusted Seller
United States - Trusted Seller
United States - Trusted Seller

STS / SPTS STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete
- Manufacturer: SPTS
United States - Trusted Seller

2005 STS ICP PRO HRM Etcher
- Manufacturer: STS
150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...
United States - Trusted Seller

2018 STS / SPTS Versalis fxP Etcher
- Manufacturer: SPTS
- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...
United States 
Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 01
INFORMATION: Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 01 The Surface Technology Systems Multiplex range of plasma systems combine a single wafer or batch vacuum load lock with STS etch...
Santa Barbara, CA
Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 02
INFORMATION: Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) The Surface Technology Systems Multiplex range of plasma systems combine a single wafer or batch vacuum load lock with STS etch pl...
Santa Barbara, CA- Trusted Seller
Bree, Ireland - Trusted Seller
Bree, Ireland - Trusted Seller
Trim, Ireland - Trusted Seller
Bree, Ireland 
2011 SPTS/STS MUC-21 ETCHER
- Manufacturer: SPTS
GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...
Wu Xi Shi, China
Yongin-si, South Korea
Yongin-si, South Korea
