GaSonics AE-2000LL Isotropic Etcher
used
- Manufacturer: GaSonics
The GaSonics Aura Loadlock Isotropic Etcher (AE-2000LL) is a microprocessor-controlled down-stream etcher that etches the font, and optionally, the backside of a wafer. The AE-200LL uses a dual-pumping loadlocked...
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