Used Etching Systems

TEL Tokyo Electron PS1 T-HV Conditioner Box T-3044SS Etcher Used Working

• Manufacturer: Tokyo Electron - TEL

TEL T-3044SS PS1 T-HV Conditioner Box TEL T-3044SS Etcher working Inventory # AA-2574 This TEL T-3044SS PS1 T-HV conditioner box is used working surplus. The physical condition of the conditioner box is good and ...

Tegal 701 Inline Automatic Wafer RF Plasma Etcher Tested Working As-Is

• Manufacturer: Tegal

“It was tested in our facility and is working except the output indexer is not operating and there are no belts for transport. The unit does power on and and all features appear to work but no further testing cou...

Hitachi Electrostatic Chuck M-712E Used Working

• Manufacturer: Hitachi
• Model: M-712E

Hitachi M-712E Electrostatic Chuck used working Inventory # AA-6076 This Hitachi M-712E Electrostatic Chuck is used working surplus. There are some scuffs and blemishes otherwise the overall physical condition of...

SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working

• Manufacturer: SMC

“Removed from a Hitachi M-712E Shallow Trench Etcher System.” SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working Inventory # A-16354 Model No: 22-Port Manifold Removed from a Hitachi M-71...

Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi PUMP1 Controller IOTU-01N IOCN-01A DIO-01N ILP-02 M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Installed PC...

Hitachi CR-712T-AC Wafer Handling Clean Robot Shunan Works M-712E Etcher As-Is

• Manufacturer: Hitachi

“The arm is included but it is not attached and appears incomplete (see photos).” Hitachi CR-712T-AC Wafer Handling Clean Robot Shunan Works M-712E Etcher As-Is Model No: Clean Robot Sold As-Is for Parts or Repai...

2018 STS / SPTS Versalis fxP Etcher

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

2000 LAM Alliance 6 9400 PTX Etcher

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

2013 Hitachi M-8190XT

• Manufacturer: Hitachi
• Model: M-8190XT

Hitachi, M-8190XT, 300mm, Plasma Etch 3 Chambers In Fab, Warm Idle Software version: 2.0405 CIM: E84, SECS-GEM. GEM300, Interface A Hardware Configuration (fab): Main system: Hitachi HTA M-8190XT (3E) Etch ...

2001 LAM Rainbow 4420 Poly Etcher

• Manufacturer: Lam Research - Novellus

1998 STS MULTIPLEX ICP Etcher

• Manufacturer: STS

Vintage: 1998 Wafer size: 6", 8" Condition: as is

2010 IVY Semiconductor Engineer Wet Etcher

• Manufacturer: IVY Semiconductor Engineer

Vintage: 2010 Condition: very good Very Clean Unit. One of the plastic tops on the etcher as you can see in one of the pictures is broken and will have to be replaced but everything else in great shape on this...

STS AOE Dielectric ICP Etcher

• Manufacturer: STS

STS AOE Dielectric ICP Etcher - 400 V - 50 Hz

STS Multiplex ICP Etcher

• Manufacturer: STS

Metal Cluster

Lam Research 490 Polyimide plasma etcher

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller