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553

Used front end

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    LAM Rainbow 4428

    • used

    • Manufacturer: Lam Research - Novellus
    • Model: RAINBOW 4428

    Lam Rainbow 4420 / Back Nitride Etch

    Yongin-si, South Korea
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    TEL TELUnityIIe 85 DD

    • used

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...

    Yongin-si, South Korea
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    LAM RB 4520

    • used

    • Manufacturer: Lam Research - Novellus

    Classic SW, 6" TABC Wafer size: 150mm

    Yongin-si, South Korea
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    AMAT DPS II

    • used

    • Manufacturer: Amat
    • Model: DPS II

    Centura Chamber

    Yongin-si, South Korea
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    1997 Hitachi M-501A

    • used

    • Manufacturer: Hitachi
    • Model: M-501A

    Metal, 1CH Wafer size: 150mm

    Yongin-si, South Korea
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    1995 Shibaura CDE-80BHN

    • used

    • Manufacturer: Shibaura

    SiN/SiO, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    1998 Hitachi M-501A

    • used

    • Manufacturer: Hitachi
    • Model: M-501A

    Plasma Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    2000 TEL TE8401

    • used

    • Manufacturer: Tokyo Electron - TEL

    SiN, 1CH Wafer size: 200mm

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • used

    • Manufacturer: Tokyo Electron - TEL

    Poly, IEM(1CH), Ebara Pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    1996 TEL UNITY IIe85DPATC

    • used

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH), ATC Wafer size: 200mm

    Yongin-si, South Korea
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    1996 TEL UNITY IIe85DP

    • used

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4428

    • used

    • Manufacturer: Lam Research - Novellus

    HARDMASK ETCHER / POLY ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    Novellus AURA 2000

    • used

    • Manufacturer: Lam Research - Novellus

    ASHER ETCH, CU Wafer size: 200mm

    Yongin-si, South Korea
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    STS ICP etcher

    • used

    • Manufacturer: STS

    DRIE w/Bosch process, SOI

    Yongin-si, South Korea
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    UNAXIS Nextral 860L

    • used

    • Manufacturer: Unaxis

    ECR etching sstem for III/V

    Yongin-si, South Korea
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