Used Ion Implantation

Check beamline condition, vacuum integrity, ion source age, high-voltage components, maintenance logs, software version, and available spare parts. Verify process history and if critical consumables were replaced regularly.

Ensure adequate power (including high-voltage grounding), chilled water or glycol cooling, stable compressed gas supplies, proper exhaust and cleanroom access, and sufficient floor load capacity and clearances for the beamline and maintenance.

Use specialized heavy-equipment movers experienced with semiconductor tools. Plan for disassembly, crating, shock monitoring, cleanroom transport procedures, local rigging, and potential customs clearance for international moves.

Expect mechanical and utility hookup, vacuum pump and leak checks, high-voltage conditioning, beam tuning, process recipe transfer, and electrical and radiation safety verification. Factory or certified service support is recommended for qualification.

Routine tasks include vacuum pump servicing, ion source replacement or cleaning, beamline alignment, inspecting high-voltage insulators, filter and gas line changes, and software backups. Follow manufacturer schedules to maintain beam stability.

Parts availability varies by manufacturer and model. Verify the supply chain for critical items (ion sources, power supplies, pumps). Consider service contracts or third-party specialists with experience on your model.