Used Etching Systems in Gyeonggi-do, South Korea

M/PLEX ICP AL

STS M/PLEX AL ETCHER Please find attache PDF format for more details.

M/PLEX ICP SI

STS M/PLEX ICP SI ETCHER, 6INCH Please find attached PDF format for more details.

NOVELLUS PEP3510

• Manufacturer: Lam Research - Novellus

Novellus GASONICS PEP3510 IRIDIA DL(S) DUAL Process : Asher, Wafer Size : 200mm SYSTEM Configuration is as attached PDF format. Missing Items as below. - YASKAWA XU-RCM 4700 : Missing. - ASTEK D13765, Q'TY : 1, L...

Unaxis VERSALINE ICP(DSE-III)

• Manufacturer: Unaxis

Plasmatherm Unaxis ICP Etcher 6inch ESC Chuck VERSALINE - Loadlock Chamber & Transfer Chamber 6inch Cassette Type - Process Chamber 6inch ESC Chuck Type - RF Generator Module. - Monitor Rack - Chiller Unit S/N ...

LAM TORUS 300K

• Manufacturer: Lam Research - Novellus
• Model: TORUS 300K

GASONICS GASONIC L3510

• Manufacturer: GaSonics

GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...

APPLIED MATERIALS ENABLER_E2

• Manufacturer: Amat
• Model: ENABLERE2

Centura AP, AMAT ENABLER, ETCH, 300MM VINTAGE : 2009-12 Note : Missing EFEM UNIT

LAM TORUS 300S

• Manufacturer: Lam Research - Novellus
• Model: TORUS 300S

MATTSON MATTSON PARADIGME

• Manufacturer: Mattson

Mattson PARADIGME_SI, Etcher Serial No. MEOO72 Wafer Size: 300mm, Wafer of Notch

2006 TEL Telius SCCM

• Manufacturer: Tokyo Electron - TEL
• Model: TELIUS SCCM

Wafer size: 12”

2005 LAM / Novellus C2 Dual Sequel Express

• Manufacturer: Lam Research - Novellus

Wafer size: 8”

Wintel Poly Etcher

• Manufacturer: Wintel

LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Application : DPT, QPT, Hard mask etch etc. Excellent Uniformity ＜1% (Concentric profile) Improved wafer edge uniformity : Wide plasma generati...

PSK Inc. PSK 300mm Etcher MKS Micr

• Manufacturer: PSK Inc.

MAKER : PSK INC. MODEL : PSK TERA21RC Etcher CHAMBER Description PSK TERA21RC Etcher CHAMBER included MKS Microwave Source (Plasma Subsystem) with Generator Rack(MKS FI20160-1 2ea) ASTEX FI20608 ...

Poly Etcher System (Conductor Etcher System)

Developing and supplying equipment with increasing demand in accordance with market trend We have secured the lineup of Poly Etcher System for 300mm Wafer to keep up with the increasing demand.