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KLA-Tencor Surfscan 6400 Particle Inspection System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6400
KLA-TENCOR SURFSCAN 6400 Particle NSPECTION SYSTEMconsisting of:- Model: Surfscan 6400- Particle Inspection System- System can handle up to 200mm capable- Cassette Handling: Single puck handling from single casse...
Decatur, GA 
KLA-TENCOR SURFSCAN 6220 (SFS 6220)
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
KLA-Tencor Surfscan 6220 (SFS 6220) Wafer Surface Contamination Analysis System The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. System is calibrated, tes...

