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Gas N2 O2 Air Flow 500SCCM W100 D30 H65 Device name: Mass flow controller
Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)
Gas H2 flow rate 10lMW150 D60 H180 Device name: Mass flow controller
Gas O2 flow rate 10LMW150 D60 H180 Device name: Mass flow controller
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan