Plasmatherm SLR-720 RIE System in Decatur, GA, USA

PLASMATHERM SLR-720 RIE consisting of:- Model: SLR-720- Single chamber with load lock- Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump- Neslab HX-75 Recirculating Chiller - Power Box- Process Software - Computer upgraded in 2011 by OEM / runs Win 98- Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2REFURBISHED TO MEET OEM SPECIFICATIONS: - Chamber disassembled and receives full wet clean.- All Chamber o-rings and seals are replaced with brand new.- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)- All MFCs rebuilt and calibrated professionally.- All corrosive gas lines replaced with brand new.- All Non-corrosive gas lines cleaned.- Vacuum pumps professionally rebuilt. - Turbo pump professionally rebuilt.- Chillers serviced and fully tested.