Used Mass Flow Controllers in Tokyo, Japan

Horiba Tech Stec SEC-410-146

• Manufacturer: Horiba

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

• Manufacturer: Horiba

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

• Manufacturer: Horiba

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Flow rate 20 SCCM Gas Ar Device name: Mass flow controller

Horiba Stec SEF-1R

Gas N2 Flow 20SLMW110 D30 H65 Device name: Mass flow controller

HORIBA STEC SEC-4400MO-UC

Gas O2 flow 500CCMW125 D31 H127 Device name: Mass flow controller