Used etch/ash/clean plasma processing

PlasmaQuest MOCVD reactor system with Thermal Scrubber and Neslab Chiller & Shimadsu DLI System

• Manufacturer: Neslab

The PlasmaQuest's MOCVD reactor system is a dual-chamber (thermal and plasma) MOCVD reactor with various equipment and peripherals including turbo pump, vane pump, thermal scrubber, chiller, specialty lines for g...