Used Nikon Wafer Slicing / Dicing

NIKON MGA2000-2133

• Manufacturer: Nikon

NIKON KBB02201-501

• Manufacturer: Nikon

NIKON 2S003-016

• Manufacturer: Nikon

Nikon S202+ Scanner

• Manufacturer: Nikon
• Model: S202

- Res 250 nm - NA 0.60 - KrF excimer laser (248 wavelength) Exposure light source - Field 25 x33 mm exposure - Ratio 1:4 - Alignment accutacy (EGA, I M I + 3s ) ? 45 nm