Used Etching Systems

Tegal 903e Plasma Etchers

• Manufacturer: Tegal

Sez SP203 Etcher

• Manufacturer: Sez

Sez SP203 • Currently configured for 8” wafer size • EQUIPMENT DETAILS: Equipment was last in production Q1 2018 and de-installed from fab May 2018. SEZ 203 Spin Processor to include: – 2x shutter door load ports...

Hitachi M-501A Etcher 2 x sets

• Manufacturer: Hitachi
• Model: M-501A

Hitachi M-501A Etcher (2 x sets) Plasma Etcher Please contact:

Semitool Spectrum 8inch

• Manufacturer: Semitool
• Model: Spectrum

Still installed in Cleanroom The system is a solvent strip tool. It consists of a cassette loading (WIP) area where multiplke cassettes may be placed. The WIP (loading area) consists of two main components, the I...

Hitachi M-602A

• Manufacturer: Hitachi
• Model: M-602A

Hitachi M-602A Please contact:

AMAT P5K Oxide Etcher

• Manufacturer: Amat

AMAT P5K Oxide Etcher Please contact:

AMAT AME 8100 Plasma Etcher

• Manufacturer: Amat

AMAT AME 8100 Plasma Etcher AMAT AME 8100 Plasma Etcher used for reactive ion etching of oxides, nitrides, and resist descum. System is configured to process, 4", 5", or 6" wafers. System is complete and i...

Hitachi M-712 Plasma Etcher PSU for Chamber Qty 2 Available

• Manufacturer: ASML

Qty 2 Available

Axic PLASMASTAR 200 Etcher / Asher

• Manufacturer: Axic

Colour:Black Perfect Condition

MRC RIE-51 Reactive Ion Etcher

• Manufacturer: MRC

MRC RIE-51 Reactive Ion Etcher

LAM 590 Etcher

• Manufacturer: Lam Research - Novellus

Original Equipment Manufacturer : Lam Research Condition : AS IS condition(No chiller, no pump, With ENI OEM 12 RF Generator) Wafer Size: 4,5,6 inch capability. Valid Time : Subject to prior sale Lead Time : Read...

Tegal CD1151-00102 Plasma Etcher

• Manufacturer: Tegal

Rena Casstte Spray Etcher

• Manufacturer: Rena

150mm (without Semitool SRD)

ICP Etch

• Manufacturer: Unknown

STS ICP

Polysilicone Etch

• Manufacturer: Unknown

Tool will be removed to a storage room from clean room on January 6th, 2015. Three chambers (A, B and D) were transferred to another Fab and are not available. Confirmed with Fab 15 there are missing & broken par...