- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
Dan-Takuma Technologies SCQRH-1802BE-S
used
- Manufacturer: Dan-Takuma Technologies
Tool Dryer for Diffusion Wafer size: 200mm
Yongin-si, South KoreaAMAT Mirra
used
- Manufacturer: Amat
- Model: MIRRA
Mirra PCMP Mirra PCMP Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW
Yongin-si, South KoreaAMAT Mirra
used
- Manufacturer: Amat
- Model: MIRRA
Process : BPSG Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW
Yongin-si, South KoreaAMAT Mirra
used
- Manufacturer: Amat
- Model: MIRRA
Process : STI/SOD/SON Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
1991 Axcelis(Eaton/Fusion) 200PCU
used
- Manufacturer: Axcelis
- Model: 200PCU
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea