TSK APM90A
new
TSK APM90 Spec Sheet Accuracy within 5 Microns / 0.2 mil (± 2.5 microns) Wafer Size 4,5, 6, and 8 inch Maximum X/Y Speed 200 mm (8″) / sec. Z Stage/Chuck Range 1.36″ Speed 35 ms/0.020″ stroke Rotation ± 5º Loader...
Sherwood, ORTSK APM90A G2
new
APM90 G2 Spec Sheet Accuracy within 5 Microns / 0.2 mil (± 2.5 microns) Wafer Size 4,5, 6, and 8 inch Maximum X/Y Speed 200 mm (8″) / sec. UF200 Processor Z Stage/Chuck Range 1.36″ Speed 35 ms/0.020″ stroke Rota...
Sherwood, OR