- Yongin-si, South Korea
1994 Lam Research TCP9600SE
used
- Manufacturer: Lam Research - Novellus
- Model: TCP 9600SE
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
2004 TEL Trias
used
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Ta Oxide(3CH)/CIF3,O2,N2,Ar,N2,PET Wafer size: 300mm
Yongin-si, South Korea- Yongin-si, South Korea
Oxford Instruments Plasmalab 133
used
- Manufacturer: Oxford
- Model: Plasmalab
Diamond-like carbon (DLC) deposition and etch
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea