Used Surface Treatment / Cleaning

Tepla 300 Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

– Manual Wafer Load Plasma Asher – Used for Wafer Cleaning and Descum – Can Process up to 150mm Wafers – Faraday Cage – Computer PC Controlled – All MFCs Rebuilt and Calibrated – Leybold D65BCS Fomblin Prepped Va...

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

Tool was de-installed on October 1st, 2014. Tool is stored in a storage room in Fab 15. Confirmed with Fab 15 tool is missing parts as of Feb 12th, 2015 and there is no modification record as of January 22nd, 201...

StripperAsher

• used

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Jan 1997 • CE Marked • Last PM Date: Nov 5, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: V3.71 • Cassette Interf...

StripperAsher

• used

• Manufacturer: Unknown

• Currently Configured for 200mm Wafer Sizes • MFG Date: Dec 1996 • Last PM Date: Nov 13, 2008 • Install Type: Stand Alone • Application: Photoresist Removal • Software version: v3.71 • Cassette Interface: o (2) ...

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M923300 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT 4.0 • System software (App): 5.6/3.4 • Cassette Interface: o (2) ...

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1999 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 2000 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 4.11 • Cassette Interface: o (2) 200mm ...

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): TBD • Cassette Interface: o (2) 200mm (...

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win2K • System software (App): 5.9.2 • Cassette Interface: o (2) 200mm (...

BRANSONIPC Series 4000 Plasma Barrel Stripper

• used

• Manufacturer: Unknown

Plasma Barrel Stripper, 10″ X 20″ Quartz Chamber, S4075-11020 Reactor Center

Dielectric Etch

• used

• Manufacturer: Unknown

Tool was de-installed on August 22nd, 2014. Tool is wrapped and stored in a storage room in Fab 15. Confirmed with Fab 15 there are no missing & damaged parts, and no modification record as of January 30th, 2015....

BRANSONIPC P-2100 Plasma Barrel Stripper

• used

• Manufacturer: Unknown

Plasma Barrel Stripper, 12″ X 20″ Quartz Chamber, 1000W RF P/S, 2ea Available

Dielectric Etch

• used

• Manufacturer: Unknown

Condition: tool is on production Standard Specifications Software Revision: Linux 5.75 Rev 001 Lot Stability Dummy SW: Software for running lot stability wafer. OEE WPH Software: Yes GEM SEC Revision: TBD Wafer S...