Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-260

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec PV-1502MC

Device name: Mass flow controller (MFC)

MKS 1480A-25077

N2 40sccm Device name: Mass flow controller (MFC)

MKS 649A-27650

Piping unit set, He＊10SCCM Device name: Mass flow controller (MFC)

Tylan FC-781

H2 2SLM Device name: Mass flow controller (MFC)

Rintek MC-2100MO

H2 2SLM Device name: Mass flow controller (MFC)

Azbil CMQ0050CSSH0100D0

• Manufacturer: Azbil - Yamatake

H2, 50 L/min Device name: Mass flow controller (MFC)