Used Mass Flow Controllers

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

SAM SFC-580MO4VD

O2 20sccm Device name: Mass flow controller

Horiba Stec PV-1502NC

Device name: Mass flow controller (MFC)

堀場エステック Stec SEC-E440

O2、500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-3400SM-SP

H2 50CCMSMT-3000 accessory Device name: Mass flow controller (MFC)

Lintec MC-3102L-NC-4JR2AAA00

• Model: MC-3102

N2, 100SCCM Device name: Mass flow controller (MFC)

Rintech CV-2100NO LEP

H2 2 SLM Device name: Mass flow controller (MFC)

Rintek MC2100MOWR

H2 200 SCCM Device name: Mass flow controller (MFC)

Hitachi Metals FCPI 980

• Manufacturer: Hitachi Metals

Manifold set: C4F8*50 SF6*500 N2*200 BCl3*200 ClF3*500 CL2*200 O2*5000 N2*10

Horiba STEC Stec SEC7330M

O2 500sccm, Ar 100sccm valve unit Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

HCI 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)