2008 Dry Etcher ULVAC NE5000N
used
- Manufacturer: Ulvac
GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...
Wu Xi Shi, China
2012 ICP Etcher ULVAC NE950
used
- Manufacturer: Ulvac
GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...
Wu Xi Shi, China
2011 SPTS/STS MUC-21 ETCHER
used
- Manufacturer: SPTS
GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...
Wu Xi Shi, China
HMS Etching Line
used
- Manufacturer: HMS
Qty.: 2; Contact: Mr. Mark Lai; Shipping term: Ex-factory Price negotiable Payment term: TT in advance Condition: As it is
Suzhou, China
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