Building Filters
2000 KLA TENCOR AIT AIT XP+(Fusion)
- Manufacturer: KLA-Tencor
- Model: AIT XP
[ System Configuration ] . CE marked . Single open cssette handler . Image Computer . (3) Collection Channels . Spot Size 7um, 5um, 3.5um . Internal Microscope Review - Microscope review Objectives 10x, 50x, 100x...
Cheonan-si, South KoreaSDI/SEMILAB FAaST 230
- Manufacturer: Semilab
- Model: FAAST 230
. Up to 8" . Automatic robotic wafer handling . Single open-cassette wafer loading station . Measurement of dielectric and interface properties on monitor wafer - Dielectric Capacitance (CD) and Thickness (EOT) -...
Cheonan-si, South Korea2004 SOLID STATE MEASRUEMENT INC. SSM5130
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Auto wafer handling (Genmark robot & pre aligner) ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Driv...
Cheonan-si, South Korea2002 NANOMETRICS Nanospec 9300
- Manufacturer: Nanometrics
- Model: Nanospec 9300
Currently 12" configured (It can be modified for 8" open cassette handling) Spectroscopic Reflectometer (SR) Two optical light sources Visable tungsten halogen lamp UV deuterium arc lamp Lens 4x,15x (Visible & UV...
Cheonan-si, South Korea1997 SOLID STATE MEASRUEMENT INC. SSM5200
- Manufacturer: SOLID STATE MEASRUEMENT INC.
Fully automated capacitance-voltage(CV),charge-voltage(QV), and current-voltage(IV) system [Direct Measurement] - Accurately measure CV, QV and IV characteristics of MOS test structures in scribe lines on product...
Cheonan-si, South KoreaAPPLIED MATERIALS AMC 7700
- Manufacturer: Amat
*. Operational at the time of de-installation,To be refurbished *. Wafer Size - 100mm(4") ~ 150mm(6") *. Reactor system configuration: - Staubli Robot - Lift & Roation Assembly - Process chamber Assembly - Lower...
Cheonan-si, South Korea