Used robotics in Gyeonggi-do, South Korea

ARMROID

"ROID Navi" was developed with the premise of being used by machine tool operators, eliminating the need for complex robot programming. The CNC for machine tools allows the robot and the machine tool to be operat...

1999 AMAT Mirra 3400

• Manufacturer: Amat
• Model: MIRRA 3400

CMP w/ Ontrack - Mirra Ontrack - Oxide Process - Dry in/Dry Out - Robot : Ontrack slide type

1995 AMAT P5000 MxP

• Manufacturer: Amat
• Model: P5000

MxP Poly Etcher - ESC Type. - Poly Etch. - Phase III robot type. - ENI OEM 12B and Phase IV RF Match. - AMAT O Heat Exchanger. If the refurbished tool is required, pls send me the RFQ and I will quote it based on...

DNS SSW 80A

• Manufacturer: Dainippon Screen
• Model: SSW-80A

DIW scrubbing / LOADER STAGE / INDEXER ROBOT / TRANSFER ROBOT / Two SPIN UNIT / HIGH PRESSURE UNIT / TRANSFORMER UNIT

DNS SSW-80W

• Manufacturer: Dainippon Screen
• Model: SSW

DIW Scrubbing LOADER STAGE / INDEXER ROBOT / TRANSFER ROBOT / Two SPIN UNIT / HIGH PRESSURE UNIT / TRANSFORMER UNIT

LAM TCP 9400 SE

• Manufacturer: Lam Research - Novellus
• Model: TCP 9400SE

Aliance A4 MAG5 ROBOT 8" 1Ch Wafer size: 200mm

Brooks Automation / Zygo ZARIS

• Manufacturer: Brooks

Reticle Macro Inspection Tool, with Staubli Robot

Brooks Jet EFEM

• Manufacturer: Brooks

Wafer Handling Robot System / Front End Module

1999 AMAT Centura

• Manufacturer: Amat
• Model: Centura

BPSG(SACVD), Giga-Fill(3CH),HP Robot Wafer size: 200mm

AMAT Centura 5200

• Manufacturer: Amat
• Model: Centura

CVD Titanium / TixZ Chamber *4 / MS Cool / HP+ Robot

AMAT Centura 5200 RTP

• Manufacturer: Amat
• Model: Centura

Narrow Body Loadlock Chamber / RTP XE Chamber * 2 / HP+ Robot / System Controller / AC Power Box

AMAT Centura 5200

• Manufacturer: Amat
• Model: Centura

WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)

AMAT Centura 5200

• Manufacturer: Amat
• Model: Centura

Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack

AMAT CENTURA 5200

• Manufacturer: Amat
• Model: Centura

Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack

TEL TELUnityIIe 85 DD

• Manufacturer: Tokyo Electron - TEL

Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...