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Used Sigma Semiconductors in Germany

  • 1999 Trikon Tech Ltd. Sigma

    1999 Trikon Tech Ltd. Sigma FxP200 RevA

    • Manufacturer: Sigma

    It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete), 1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The Platform is upgradet from T5 Controller (MX800) ...

    Regensburg, Germany