Used Mass Flow Controllers in Tokyo, Japan

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

• Manufacturer: Horiba

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-7330M

• Manufacturer: Horiba

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-UL

• Manufacturer: Horiba

Flow: 1 SLM Gas: H2 Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3 Flow: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas:H2 Flow rate:3SLM Device name: Mass flow controller (MFC)