Building Filters
1999 Tel Mercury
- Manufacturer: Tokyo Electron - TEL
Glass cleaning Width: 33.465 in (85.0 cm) | Depth: 52.992 in (134.6 cm) | Height: 39.764 in (101.0 cm)
Regensburg, Germany
2007 Tel ACT12
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-12
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE last time in production: 07.08.2024
Regensburg, Germany
2013 Tel ACT8-D
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet Last Time in production: 5/5/25 Contact: Agthen Robert (FE DRS P M2 MNT LIT)
Regensburg, Germany
2004 Tel ACT8-D
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3
Regensburg, Germany