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    Tokyo Electron Ltd. Trias Ti/TiN Chamber

    • Manufacturer: Tokyo Electron - TEL
    • Model: Trias

    Tokyo Electron Ltd. Trias Ti/TiN Chamber Parts/Peripherals Currently Configured for 300mm wafer size EQUIPMENT DETAILS: Chamber Only Chamber Qty 4 TiN (PM1/PM2/PM3/PM4) Basic System (TEL Trias) Tool ID: DMT...

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