Semiconductors » Thermal processing equipment (semiconductors)

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Used furnace

Trusted Seller
High Temperature Kiln
Furnaces Services Inc. Power input 45 KVA At 220 volt, 3 phase. Usable inside dimensions 20" dia. X 20" high. Halmar Robicon control panel
Savona, Canada
Allwin21 Accuthermo AW810M RTP Rapid Thermal Annealer 65026
- Manufacturer: My Store
ALLWIN21 ACCUTHERMO AW810M RTP 200mm Rapid Thermal Processing System. Date of MFG 09/2021. Very Light Use. The system uses high intensity visible radiation to heat single wafer for short process periods of time...
$65,000 USD
Get financing
Est. $1,223/mo
Freehold Township, NJ
Trusted Seller
Kokusai Electric Co Ltd Quixace II
- Manufacturer: Kokusai
Kokusai Electric Co., Ltd. Quixace II Vertical Diffusion Furnace
Bree, Ireland
Trusted Seller
Koyo VF-5300B V35X
- Manufacturer: Koyo
Koyo VF-5300B V35X Furnace/Polyimide Bake/8in.
Bree, Ireland
Trusted Seller
Tokyo Electron Ltd OfenTel Minibatch NITRID for 12 300 mm
- Manufacturer: Tokyo Electron - TEL
Tokyo Electron Ltd OfenTel Minibatch (NITRID) for 12″ / 300 mm Furnace TEL Minibatch (NITRID) OfenTel Minibatch (NITRID) OfenTel Minibatch (NITRID)
Bree, Ireland
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan
Thermo Lindberg/BlueM M01450C-1 Industrial Oven
- Manufacturer: Lindberg/Blue M
Thermo Lindberg/BlueM M01450C-1 is an industrial oven designed for a variety of heating applications. This model is manufactured by Lindberg/Blue M and is currently used/refurbished. Performance: Temperature ran...
Taipei City, Taiwan

Overview

Thermal processing equipment for semiconductors includes furnaces, rapid thermal processors (RTP), annealing systems and diffusion/oxidation tools that alter wafer properties through controlled heating. These machines require precise temperature profiles, atmosphere control and uniformity to meet tight process windows. When sourcing used units for fabs, R&D or pilot lines, evaluate throughput, wafer-size compatibility, process recipes, tool condition, software version and spare-parts availability to ensure integration and uptime.

FAQ

What should I inspect when buying used thermal processing equipment?

Review process history and recipes, verify wafer-size and throughput compatibility, inspect chambers and heating elements, check maintenance logs and contamination history, confirm software version and spare-parts/consumables availability, and verify power, gas and vacuum requirements.

How do I ship and install these machines safely?

Use carriers experienced with semiconductor tools, clean and secure internal components, protect optics and heaters, consider climate-controlled transport, use vibration/shock monitoring, insure the load, and arrange certified rigging and on-site requalification.

What maintenance practices keep uptime high?

Schedule regular calibrations, replace heating elements and thermocouples per OEM intervals, service vacuum pumps and gas lines, perform routine chamber cleans and leak checks, keep software updated, and consider a service contract with OEM or qualified technicians.