Semiconductors » Thermal processing equipment (semiconductors)

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Overview

Thermal processing equipment for semiconductors includes furnaces, rapid thermal processors (RTP), annealing systems and diffusion/oxidation tools that alter wafer properties through controlled heating. These machines require precise temperature profiles, atmosphere control and uniformity to meet tight process windows. When sourcing used units for fabs, R&D or pilot lines, evaluate throughput, wafer-size compatibility, process recipes, tool condition, software version and spare-parts availability to ensure integration and uptime.

FAQ

What should I inspect when buying used thermal processing equipment?

Review process history and recipes, verify wafer-size and throughput compatibility, inspect chambers and heating elements, check maintenance logs and contamination history, confirm software version and spare-parts/consumables availability, and verify power, gas and vacuum requirements.

How do I ship and install these machines safely?

Use carriers experienced with semiconductor tools, clean and secure internal components, protect optics and heaters, consider climate-controlled transport, use vibration/shock monitoring, insure the load, and arrange certified rigging and on-site requalification.

What maintenance practices keep uptime high?

Schedule regular calibrations, replace heating elements and thermocouples per OEM intervals, service vacuum pumps and gas lines, perform routine chamber cleans and leak checks, keep software updated, and consider a service contract with OEM or qualified technicians.