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3

Used controller

  • Trusted Seller
    2016 Ulvac SIV 500 ITO

    2016 Ulvac SIV 500 ITO Sputter System

    • Manufacturer: Ulvac

    • 3-station process module (P1, P2, P3) • 5 kW pulsed DC power supply • P3 dedicated to ITO or other TCF • P3 has O₂ MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L has roughing pump an...

    United States
  • Trusted Seller
    2014 Ulvac SIV 200 ITO

    2014 Ulvac SIV 200 ITO Sputter System

    • Manufacturer: Ulvac

    • 3-station process module (P1, P2, P3) • 5 kW pulsed DC power supply • P3 dedicated to ITO or other TCF • P3 has O₂ MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L has roughing pump an...

    United States
  • 2011 PECVD Double Chamber ULVAC

    2011 PECVD Double Chamber ULVAC CME-200J Plasma-Enhanced Chemical Vapor Deposition)

    • Manufacturer: Ulvac
    • Model: CME-200

    CHAMBER 1 GAS BOX CONFIG GAS 1 Aera TC FC-R7800 SiH4(10%)/N2 500SCCM GAS 2 Aera FC-7700 N2O 2000SCCM GAS 3 Aera FC-7700 O2 100SCCM GAS 4 Aera FC-7700 CF4(0.424) 500SCCM PROCESS CHAMBER 1 CONGIF 250MMX250MM ...

    Wu Xi Shi, China