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Used Ulvac Plasma Etching (Dry Etching)

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    Ulvac Enviro Downstream Microwave Asher

    Ulvac Enviro Downstream Microwave Asher

    • Manufacturer: Ulvac
    • Model: Enviro

    Ulvac Enviro Downstream Microwave Asher consisting of:- Single Chamber Advanced Strip System - Currently Configured for 6" Wafers - Computer- ENI OEM-6B RF Generator- 5 MFCs- Brooks Robot- Edwards IQ Pump/Blower-...

    Decatur, GA