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Used Ulvac Semiconductors in Jiangsu, China

  • 2012 ICP Etcher ULVAC NE950

    2012 ICP Etcher ULVAC NE950

    • Manufacturer: Ulvac
    • Model: NE-950

    GAS BOX CONFIG GAS 1 HORIBA STEC SEC-E40 Ar 100SCCM GAS 2 HORIBA STEC SEC-E40 O2 100SCCM GAS 3 HORIBA STEC SEC-E40 CHF3 100SCCM GAS 4 HORIBA STEC SEC-E440J BCL3 200SCCM GAS 5 HORIBA STEC SEC-E440J CL2 200SCC...

    Wu Xi Shi, China
  • 2008 Dry Etcher ULVAC NE5000N

    2008 Dry Etcher ULVAC NE5000N

    • Manufacturer: Ulvac

    GAS BOX CONFIG GAS 1: AREA FC-780C 50 SCCM Cl2 GAS 2: AREA FC-780C 50 SCCM SiCl4 GAS 3: AREA FC-780C 50 SCCM CH2Cl2 GAS 4: AREA FC-770AC 200 SCCM O2 GAS 5: AREA FC-770AC 50 SCCM SF6 GAS 6: AREA FC-770AC 100...

    Wu Xi Shi, China
  • 2011 PECVD Double Chamber ULVAC

    2011 PECVD Double Chamber ULVAC CME-200J Plasma-Enhanced Chemical Vapor Deposition)

    • Manufacturer: Ulvac
    • Model: CME-200

    CHAMBER 1 GAS BOX CONFIG GAS 1 Aera TC FC-R7800 SiH4(10%)/N2 500SCCM GAS 2 Aera FC-7700 N2O 2000SCCM GAS 3 Aera FC-7700 O2 100SCCM GAS 4 Aera FC-7700 CF4(0.424) 500SCCM PROCESS CHAMBER 1 CONGIF 250MMX250MM ...

    Wu Xi Shi, China