Unaxis VERSALINE ICP(DSE-III)
used
- Manufacturer: Unaxis
Plasmatherm Unaxis ICP Etcher 6inch ESC Chuck VERSALINE - Loadlock Chamber & Transfer Chamber 6inch Cassette Type - Process Chamber 6inch ESC Chuck Type - RF Generator Module. - Monitor Rack - Chiller Unit S/N ...
Gyeonggi-do, South Korea