Used Etching Systems

TEL TE-8500S Etcher

• Manufacturer: Tokyo Electron - TEL
• Model: TE-8500S

SiO Etch, Clamp type, 200MM Gas:CHF3/CF4/He/Ar/N2

Ulvac Etcher Model TDE300 (top and bottom etcher - 3D)

• Manufacturer: Ulvac

Original price 2.75M, can etch round stensils, up to 8" wafers

Ulvac Technologies Enviro II Dual Chamber

• Manufacturer: Ulvac
• Model: Enviro

Dual chamber 200mm strip system Good condition Inquire for details

Corial 300IL ICP Dry Etcher System

• Manufacturer: Corial

Corial 300IL ICP Dry Etcher System Tray size is 14inches N2,H2,O2, Gases

Hitachi M-308ATW

• Manufacturer: Hitachi
• Model: M-308ATW

Hitachi M-318SX

• Manufacturer: Hitachi
• Model: M-318SX

STS ICP Etcher

• Manufacturer: STS

Wafer size: 6.0

TEL TE-8500SATC Etcher

• Manufacturer: Tokyo Electron - TEL

Etchx1/ATCx1, Missing parts available 200MM

TOK TCE-4802 Etcher

• Manufacturer: TOK

200MM

TEL TE-8600 Etcher

• Manufacturer: Tokyo Electron - TEL

W-Etchback Process, Clamptype, 200MM Gas:SF6 Ar O2 He N2

TEL TE-8500PEATC Etcher

• Manufacturer: Tokyo Electron - TEL

150MM

TEL TE8500 Plasma Etcher

• Manufacturer: Tokyo Electron - TEL
• Model: TE8500

150MM

TOK TSE306W Plasma Etcher

• Manufacturer: TOK

150MM

Axcelis Technologies Inc. Fusion ES3

• Manufacturer: Axcelis

Axcelis Technologies Inc. Fusion ES3 Stripper/Asher

HITACHI HTA M712E 200mm

• Manufacturer: Hitachi
• Model: M-712E

SHALLOW TRENCH ETCHER