Used Mass Flow Controllers in Tokyo, Japan

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-770AC

Gas CF4 flow rate 200 SCCM W130 D32 H127 Device name: Mass flow controller

Horiba Stec PV-1502MC

Device name: Mass flow controller (MFC)

MKS 1480A-25077

N2 40sccm Device name: Mass flow controller (MFC)

MKS 649A-27650

Piping unit set, He＊10SCCM Device name: Mass flow controller (MFC)

Tylan FC-781

H2 2SLM Device name: Mass flow controller (MFC)

Rintek MC-2100MO

H2 2SLM Device name: Mass flow controller (MFC)

Azbil CMQ0050CSSH0100D0

H2, 50 L/min Device name: Mass flow controller (MFC)

Horiba Estec Stec SEC-7355

H2 100SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

Sih4 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih2CI2 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

Sih2CI2 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-4600

H2,60SLM VCR Device name: Mass flow controller (MFC)