Used Mass Flow Controllers

Tylan FC-780C

Gas Ar flow rate 200 SCCM Device name: Mass flow controller

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-771C

Gas N2 flow 20SLMW125 D34 H170 Device name: Mass flow controller

Tylan FC-771C

Gas O2 Flow 20SLMW125 D31 H140 Device name: Mass flow controller

Tylan FC-770AC

Gas Ar flow 20 SCCM W120 D32 H125 Device name: Mass flow controller

Tylan FC-260

Gas HCl flow rate 1 SLMW130 D25 H110 Device name: Mass flow controller

Hitachi Metals SFC-480

• Manufacturer: Hitachi Metals

Gas Ar Flow 1000 SCCM W120 D32 H140 Device name: Mass flow controller

Edwards 825

• Manufacturer: Edwards

Gas Ar flow rate 50 SCCM W130 D25 H160 Device name: Mass flow controller

Horiba Stec SEC-7440MC

• Manufacturer: Horiba

Gas WF6 Flow 100 SCCM W133 D31 H127 Device name: Mass flow controller

Horiba Stec SEC-4400RO

Gas O2 Flow 500 SCCM W230 D45 H140 Device name: Mass flow controller

Horiba Tech SEC-500MK3

Gas H2 flow rate 10lMW150 D60 H180 Device name: Mass flow controller

Tylan FC-860

Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-780C

Gas NH3 Flow 500 SCCM W125 D33 H150 Device name: Mass flow controller