Used Mass Flow Controllers

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

• Manufacturer: Horiba

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

• Manufacturer: Horiba

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: AR Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow:100SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 500 SCCM Gas: AR Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM Gas: AR Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-RC

• Manufacturer: Horiba

Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:100SCCM Device name: Mass flow controller (MFC)